Kugwiritsa Ntchito Mwachindunji kwa Plasma Cleaners

Makina otsuka m'madzi a m'magazi amapanga madzi a m'magazi poyika maelekitirodi awiri mu chidebe chosindikizidwa kuti apange malo amagetsi. Pampu ya vacuum imagwiritsidwa ntchito posunga mulingo wina wa vacuum. Pamene mpweya ukuchulukirachulukira, mtunda pakati pa mamolekyu ndi kuyenda kwaulere kwa mamolekyu kapena ma ion kumawonjezeka. Mothandizidwa ndi magetsi, ma ion awa amawombana ndikupanga plasma. Ma ion awa amakhala otakasuka kwambiri, okhala ndi mphamvu zokwanira kuthyola pafupifupi ma khemikari onse, zomwe zimapangitsa kuti pakhale mawonekedwe amankhwala pamalo aliwonse owonekera. Mitundu yosiyanasiyana ya plasma imakhala ndi mankhwala osiyanasiyana. Mwachitsanzo, plasma ya okosijeni ndi okosijeni kwambiri, yomwe imatha kutulutsa photoresist kuti ipange mpweya, motero imakwaniritsa kuyeretsa. Madzi a m'magazi owononga mpweya ali ndi anisotropy yabwino kwambiri, yomwe imakwaniritsa zofunikira za etching. Kuchiza kwa plasma kumatulutsa kuwala, chifukwa chake amatchedwa kutulutsa kowala.
Njira yoyeretsera plasma imadalira makamaka "kuyambitsa" kwa tinthu tating'ono ta plasma kuti tichotse madontho apansi. Pankhani ya momwe zimagwirira ntchito, kuyeretsa madzi a m'magazi kumaphatikizapo njira zotsatirazi: mpweya wachilengedwe umalowa mu plasma; zinthu mpweya ndi adsorbed pa olimba pamwamba; magulu adsorbed amachita ndi mamolekyu pa olimba pamwamba kupanga mankhwala mamolekyu; mamolekyu azinthu amawola kukhala gawo la gasi; ndipo zotsalira zomwe zimachotsedwa zimachotsedwa pamwamba.

Chofunikira kwambiri paukadaulo woyeretsa m'madzi a m'magazi ndikuti amatha kuchiza mtundu uliwonse wa gawo lapansi, kuphatikiza zitsulo, semiconductors, oxides, ndi zinthu zambiri za polima monga polypropylene, polyester, polyimide, polyvinyl chloride, epoxy, ngakhale polytetrafluoroethylene. Ikhoza kuyeretsa malo onse ndi malo enieni, komanso mapangidwe ovuta.